Granted Patent
Utility
US 6,586,070 · App. 10/119,328
Thin film TiSixNy protective layer
Inventors:
Qing Dai, Bruno Marchon, Michael Scarpulla, Richard L. White, Bing K. Yen
Patented Case
View Patent ↗
Granted: Jul 1, 2003
Filed: Apr 8, 2002
Inventors
Qing Dai
Bruno Marchon
Michael Scarpulla
Richard L. White
Bing K. Yen
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.