Granted Patent
Utility
US 6,586,161 · App. 10/245,503
Mass production method of semiconductor integrated circuit device and manufacturing method of electronic device
Inventors:
Takuya Futase, Tomonori Saeki, Mieko Kashi
Patented Case
View Patent ↗
Granted: Jul 1, 2003
Filed: Sep 18, 2002
Inventors
Takuya Futase
Tomonori Saeki
Mieko Kashi
Assignees (at issue)
HITACHI, LTD.
Hitachi Ulsi Systems Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.