Granted Patent
Utility
US 6,586,263 · App. 09/747,497
Correction of overlay offset between inspection layers in integrated circuits
Inventors:
David J. Muradian, Arman Sagatelian
Patented Case
View Patent ↗
Granted: Jul 1, 2003
Filed: Dec 22, 2000
Inventors
David J. Muradian
Arman Sagatelian
Assignee (at issue)
Neuristics Physics Laboratory, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.