Granted Patent
Utility
US 6,586,327 · App. 09/965,622
Fabrication of semiconductor devices
Inventor:
Daniel R. Shepard
Patented Case
View Patent ↗
Granted: Jul 1, 2003
Filed: Sep 27, 2001
Inventor
Daniel R. Shepard
Assignee (at issue)
NUP2 Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.