Granted Patent
Utility
US 6,586,337 · App. 10/035,519
Method and apparatus for endpoint detection during chemical mechanical polishing
Inventor:
Prabodh J. Parikh
Patented Case
View Patent ↗
Granted: Jul 1, 2003
Filed: Nov 9, 2001
Inventor
Prabodh J. Parikh
Assignee (at issue)
SpeedFam-IPEC Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.