Granted Patent
Utility
US 6,586,757 · App. 09/875,719
Plasma focus light source with active and buffer gas control
Inventors:
Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, Richard M. Ness, Daniel L. Birx late of, Richard L. Sandstrom, John Rauch
Patented Case
View Patent ↗
Granted: Jul 1, 2003
Filed: Jun 6, 2001
Inventors
Stephan T. Melnychuk
William N. Partlo
Igor V. Fomenkov
Richard M. Ness
Daniel L. Birx late of
Richard L. Sandstrom
John Rauch
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.