Granted Patent
Utility
US 6,586,841 · App. 09/546,432
Mechanical landing pad formed on the underside of a MEMS device
Inventors:
Michael Julian Daneman, Behrang Behin, Meng-Hsiung Kiang
Patented Case
View Patent ↗
Granted: Jul 1, 2003
Filed: Apr 10, 2000
Inventors
Michael Julian Daneman
Behrang Behin
Meng-Hsiung Kiang
Assignee (at issue)
Onix Microsystems
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.