IP Library Granted Patent US 6,586,842
Granted Patent Utility
US 6,586,842 · App. 09/793,993

Dual damascene integration scheme for preventing copper contamination of dielectric layer

Inventors: Lu You, Fei Wang, Christy Mei-Chu Woo
Patented Case View Patent ↗
Granted: Jul 1, 2003 Filed: Feb 28, 2001
Inventors
Lu You
Fei Wang
Christy Mei-Chu Woo
Assignee (at issue)
Advanced Micro Devices, Inc.

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Quick Facts
Patent No.
US 6,586,842
App. No.
09/793,993
Filed
2001-02-28
Granted
2003-07-01
Kind
B1