Granted Patent
Utility
US 6,586,887 · App. 10/090,757
High-frequency power supply apparatus for plasma generation apparatus
Inventors:
Yasuo Oogoshi, Youji Takahashi, Tadamitsu Kanekiyo, Tsuyoshi Umemoto
Patented Case
View Patent ↗
Granted: Jul 1, 2003
Filed: Mar 6, 2002
Inventors
Yasuo Oogoshi
Youji Takahashi
Tadamitsu Kanekiyo
Tsuyoshi Umemoto
Assignee (at issue)
Hitachi High-Technologies Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.