Granted Patent
Utility
US 6,587,613 · App. 09/911,818
Hybrid MEMS fabrication method and new optical MEMS device
Inventor:
Jeffrey F. De Natale
Patented Case
View Patent ↗
Granted: Jul 1, 2003
Filed: Jul 24, 2001
Inventor
Jeffrey F. De Natale
Assignee (at issue)
Innovative Technology Licensing LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.