Granted Patent
Utility
US 6,590,221 · App. 10/010,910
On-line measuring system for measuring substrate thickness and the method thereof
Inventors:
Jong Eun Ha, Taek Cheon Kim, Ju Yeol Baek, Jae Seok Choi, Jang Soo Choi
Patented Case
View Patent ↗
Granted: Jul 8, 2003
Filed: Dec 5, 2001
Inventors
Jong Eun Ha
Taek Cheon Kim
Ju Yeol Baek
Jae Seok Choi
Jang Soo Choi
Assignee (at issue)
SAMSUNG CORNING CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.