Granted Patent
Utility
US 6,590,267 · App. 09/661,997
Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
Inventors:
Scott H. Goodwin-Johansson, Gary Elder McGuire
Patented Case
View Patent ↗
Granted: Jul 8, 2003
Filed: Sep 14, 2000
Inventors
Scott H. Goodwin-Johansson
Gary Elder McGuire
Assignee (at issue)
MCNC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.