Granted Patent
Utility
US 6,590,313 · App. 09/963,756
MEMS microactuators located in interior regions of frames having openings therein and methods of operating same
Inventors:
Vivek Agrawal, Robert L. Wood, Ramaswamy Mahadevan
Patented Case
View Patent ↗
Granted: Jul 8, 2003
Filed: Sep 26, 2001
Inventors
Vivek Agrawal
Robert L. Wood
Ramaswamy Mahadevan
Assignee (at issue)
Memscap S.A.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.