Granted Patent
Utility
US 6,590,922 · App. 09/879,311
Injection seeded F2 laser with line selection and discrimination
Inventors:
Eckehard D. Onkels, Richard L. Sandstrom, Richard M. Ness, William N. Partlo, Alexander I. Ershov, Choonghoon Oh
Patented Case
View Patent ↗
Granted: Jul 8, 2003
Filed: Jun 12, 2001
Inventors
Eckehard D. Onkels
Richard L. Sandstrom
Richard M. Ness
William N. Partlo
Alexander I. Ershov
Choonghoon Oh
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.