Granted Patent
Utility
US 6,592,736 · App. 09/683,597
Methods and apparatus for controlling an amount of a chemical constituent of an electrochemical bath
Inventors:
Dakin Fulton, Thomas Ritzdorf
Patented Case
View Patent ↗
Granted: Jul 15, 2003
Filed: Jan 23, 2002
Inventors
Dakin Fulton
Thomas Ritzdorf
Assignee (at issue)
Semitool, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.