Granted Patent
Utility
US 6,592,835 · App. 09/836,594
Silica substrate or portion formed from oxidation of monocrystalline silicon
Inventors:
Carolyn M. Matzke, Dennis J. Rieger, Robert V. Ellis
Patented Case
View Patent ↗
Granted: Jul 15, 2003
Filed: Apr 16, 2001
Inventors
Carolyn M. Matzke
Dennis J. Rieger
Robert V. Ellis
Assignee (at issue)
Sandia Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.