Granted Patent
Utility
US 6,592,980 · App. 09/711,573
Mesoporous films having reduced dielectric constants
Inventors:
James Edward MacDougall, Kevin Ray Heier, Scott J. Weigel, Timothy Weidman, Alexandros T. Demos, Nikolaos Bekiaris, Yunfeng Lu, Michael P. Nault, Robert P. Mandal
Patented Case
View Patent ↗
Granted: Jul 15, 2003
Filed: Nov 13, 2000
Inventors
James Edward MacDougall
Kevin Ray Heier
Scott J. Weigel
Timothy Weidman
Alexandros T. Demos
Nikolaos Bekiaris
Yunfeng Lu
Michael P. Nault
Robert P. Mandal
Assignee (at issue)
Air Products and Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.