Granted Patent
Utility
US 6,593,159 · App. 09/532,063
Semiconductor substrate, semiconductor device and method of manufacturing the same
Inventors:
Tadao Hashimoto, Osamu Imafuji, Masaaki Yuri, Masahiro Ishida
Patented Case
View Patent ↗
Granted: Jul 15, 2003
Filed: Mar 21, 2000
Inventors
Tadao Hashimoto
Osamu Imafuji
Masaaki Yuri
Masahiro Ishida
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.