Granted Patent
Utility
US 6,593,239 · App. 09/366,588
Chemical mechanical polishing method useful for copper substrates
Inventors:
Vlasta Brusic Kaufman, Rodney Kistler
Patented Case
View Patent ↗
Granted: Jul 15, 2003
Filed: Aug 4, 1999
Inventors
Vlasta Brusic Kaufman
Rodney Kistler
Assignee (at issue)
Cabot Microelectronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.