IP Library Granted Patent US 6,593,583
Granted Patent Utility
US 6,593,583 · App. 09/754,649

Ion beam processing position correction method

Inventor: Kouji Iwasaki
Patented Case View Patent ↗
Granted: Jul 15, 2003 Filed: Mar 22, 2001
Inventor
Kouji Iwasaki
Assignee (at issue)
SEIKO INSTRUMENTS INC.

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Quick Facts
Patent No.
US 6,593,583
App. No.
09/754,649
Filed
2001-03-22
Granted
2003-07-15
Kind
B2