Granted Patent
Utility
US 6,594,093 · App. 10/039,841
Adjusting apparatus for an optical element in a lens system
Inventors:
Timo Moeller, Bernhard Gellrich
Patented Case
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Granted: Jul 15, 2003
Filed: Jan 3, 2002
Inventors
Timo Moeller
Bernhard Gellrich
Assignee (at issue)
Carl Zeiss Semiconductor Manufacturing Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.