Granted Patent
Utility
US 6,594,546 · App. 10/134,125
Plant for processing wafers
Inventor:
Jürgen Elger
Patented Case
View Patent ↗
Granted: Jul 15, 2003
Filed: Apr 29, 2002
Inventor
Jürgen Elger
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.