Granted Patent
Utility
US 6,596,148 · App. 09/651,016
Regeneration of plating baths and system therefore
Inventors:
Brett Belongia, Zhen Wu Lin, John E. Pillion, Jieh-Hwa Shyu
Patented Case
View Patent ↗
Granted: Jul 22, 2003
Filed: Aug 30, 2000
Inventors
Brett Belongia
Zhen Wu Lin
John E. Pillion
Jieh-Hwa Shyu
Assignee (at issue)
Mykrolis Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.