Granted Patent
Utility
US 6,596,973 · App. 10/096,138
Pyrometer calibrated wafer temperature estimator
Inventors:
James Donald, Ivo Raaijmakers
Patented Case
View Patent ↗
Granted: Jul 22, 2003
Filed: Mar 7, 2002
Inventors
James Donald
Ivo Raaijmakers
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.