Granted Patent
Utility
US 6,597,193 · App. 09/810,789
Steady state method for measuring the thickness and the capacitance of ultra thin dielectric in the presence of substantial leakage current
Inventors:
Jacek Lagowski, Alexander Savtchouk, Marshall D. Wilson
Patented Case
View Patent ↗
Granted: Jul 22, 2003
Filed: Mar 16, 2001
Inventors
Jacek Lagowski
Alexander Savtchouk
Marshall D. Wilson
Assignee (at issue)
Semiconductor Diagnostics, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.