Granted Patent
Utility
US 6,597,429 · App. 09/833,077
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Inventors:
Eric W. A. Janssen, Marcel J. M. Renkens, Jakob Vijfvinkel, Ronald Maarten Schneider, Theo H. J. Bisschops, Rob Tabor
Patented Case
View Patent ↗
Granted: Jul 22, 2003
Filed: Apr 12, 2001
Inventors
Eric W. A. Janssen
Marcel J. M. Renkens
Jakob Vijfvinkel
Ronald Maarten Schneider
Theo H. J. Bisschops
Rob Tabor
Assignee (at issue)
ASML NETHERLANDS B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.