Granted Patent
Utility
US 6,597,434 · App. 09/813,135
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Inventor:
Antonius Johannes Josephus Van Dijsseldonk
Patented Case
View Patent ↗
Granted: Jul 22, 2003
Filed: Mar 21, 2001
Inventor
Antonius Johannes Josephus Van Dijsseldonk
Assignee (at issue)
ASML NETHERLANDS B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.