Granted Patent
Utility
US 6,597,448 · App. 09/644,069
Apparatus and method of inspecting foreign particle or defect on a sample
Inventors:
Hidetoshi Nishiyama, Minori Noguchi, Yoshimasa Ohshima, Tetsuya Watanabe, Hisato Nakamura, Takahiro Jingu, Yuko Inoue, Keiichi Saiki, Kenji Watanabe
Patented Case
View Patent ↗
Granted: Jul 22, 2003
Filed: Aug 23, 2000
Inventors
Hidetoshi Nishiyama
Minori Noguchi
Yoshimasa Ohshima
Tetsuya Watanabe
Hisato Nakamura
Takahiro Jingu
Yuko Inoue
Keiichi Saiki
Kenji Watanabe
Assignees (at issue)
HITACHI, LTD.
Hitachi Electronics Engineering Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.