Granted Patent
Utility
US 6,597,490 · App. 09/994,572
Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same
Inventor:
Parvis Tayebati
Patented Case
View Patent ↗
Granted: Jul 22, 2003
Filed: Nov 27, 2001
Inventor
Parvis Tayebati
Assignee (at issue)
Coretek, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.