Granted Patent
Utility
US 6,597,813 · App. 09/265,861
Masks with modulated clustering and aperiodicity and rescaling of masks
Inventors:
Mikel Stanich, Gerhard Robert Thompson, Charles P. Tresser, Chai Wah Wu
Patented Case
View Patent ↗
Granted: Jul 22, 2003
Filed: Mar 11, 1999
Inventors
Mikel Stanich
Gerhard Robert Thompson
Charles P. Tresser
Chai Wah Wu
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.