Granted Patent
Utility
US 6,599,175 · App. 09/923,172
Apparatus for distributing a fluid through a polishing pad
Inventors:
John D. Herb, Stephen C. Schultz
Patented Case
View Patent ↗
Granted: Jul 29, 2003
Filed: Aug 6, 2001
Inventors
John D. Herb
Stephen C. Schultz
Assignee (at issue)
SpeedFam-IPEC Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.