Granted Patent
Utility
US 6,599,761 · App. 09/917,067
Monitoring and test structures for silicon etching
Inventors:
Jeffery Hess, Steven Leith, Donald W. Schulte, William Edwards, Jeffrey S. Obert, Timothy Emery
Patented Case
View Patent ↗
Granted: Jul 29, 2003
Filed: Jul 26, 2001
Inventors
Jeffery Hess
Steven Leith
Donald W. Schulte
William Edwards
Jeffrey S. Obert
Timothy Emery
Assignee (at issue)
Hewlett-Packard Development Company, L.P.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.