Granted Patent
Utility
US 6,599,794 · App. 10/195,484
Method of manufacturing a semiconductor device and semiconductor device
Inventors:
Masahiro Kiyotoshi, Kazuhiro Eguchi, Masaaki Nakabayashi, Fumihiko Inoue
Patented Case
View Patent ↗
Granted: Jul 29, 2003
Filed: Jul 16, 2002
Inventors
Masahiro Kiyotoshi
Kazuhiro Eguchi
Masaaki Nakabayashi
Fumihiko Inoue
Assignees (at issue)
Kabushiki Kaisha Toshiba
Fujitsu Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.