Granted Patent
Utility
US 6,599,798 · App. 09/910,771
Method of preparing buried LOCOS collar in trench DRAMS
Inventors:
Helmut Tews, Stephan Kudelka, Uwe Schroeder, Rolf Weis
Patented Case
View Patent ↗
Granted: Jul 29, 2003
Filed: Jul 24, 2001
Inventors
Helmut Tews
Stephan Kudelka
Uwe Schroeder
Rolf Weis
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.