Granted Patent
Utility
US 6,600,565 · App. 09/560,719
Real-time evaluation of stress fields and properties in line features formed on substrates
Inventors:
Subra Suresh, Ares J. Rosakis
Patented Case
View Patent ↗
Granted: Jul 29, 2003
Filed: Apr 27, 2000
Inventors
Subra Suresh
Ares J. Rosakis
Assignee (at issue)
California Institute of Technology
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.