Granted Patent
Utility
US 6,602,436 · App. 09/925,209
Chemical mechanical planarization of metal substrates
Inventors:
Glenn C. Mandigo, Ross E. Barker, II, Craig Lack, Ian Sullivan, Wendy Goldberg
Patented Case
View Patent ↗
Granted: Aug 5, 2003
Filed: Aug 9, 2001
Inventors
Glenn C. Mandigo
Ross E. Barker, II
Craig Lack
Ian Sullivan
Wendy Goldberg
Assignee (at issue)
Rodel Holdings, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.