Granted Patent
Utility
US 6,602,783 · App. 09/676,426
Deposition of titanium amides
Inventors:
Matthias J. Jahl, Douglas W. Carson, Shantia Riahi, Raymond Nicholas Vrtis
Patented Case
View Patent ↗
Granted: Aug 5, 2003
Filed: Sep 29, 2000
Inventors
Matthias J. Jahl
Douglas W. Carson
Shantia Riahi
Raymond Nicholas Vrtis
Assignee (at issue)
Air Products and Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.