Granted Patent
Utility
US 6,602,784 · App. 10/213,915
Radical-assisted sequential CVD
Inventor:
Ofer Sneh
Patented Case
View Patent ↗
Granted: Aug 5, 2003
Filed: Aug 6, 2002
Inventor
Ofer Sneh
Assignee (at issue)
Genus, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.