Granted Patent
Utility
US 6,602,785 · App. 09/614,361
Method of forming a conductive contact on a substrate and method of processing a semiconductor substrate using an ozone treatment
Inventors:
Sujit Sharan, Gurtej S. Sandhu, Terry L. Gilton
Patented Case
View Patent ↗
Granted: Aug 5, 2003
Filed: Jul 12, 2000
Inventors
Sujit Sharan
Gurtej S. Sandhu
Terry L. Gilton
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.