Granted Patent
Utility
US 6,602,786 · App. 10/082,532
One-step process for forming titanium silicide layer on polysilicon
Inventor:
Hamilton Lu
Patented Case
View Patent ↗
Granted: Aug 5, 2003
Filed: Feb 21, 2002
Inventor
Hamilton Lu
Assignee (at issue)
International Rectifier Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.