Granted Patent
Utility
US 6,603,549 · App. 09/931,726
Convolution method for measuring laser bandwidth
Inventors:
Steven F. Haas, Richard L. Sandstrom, Thomas Hofmann, Alexander I. Ershov
Patented Case
View Patent ↗
Granted: Aug 5, 2003
Filed: Aug 16, 2001
Inventors
Steven F. Haas
Richard L. Sandstrom
Thomas Hofmann
Alexander I. Ershov
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.