Granted Patent
Utility
US 6,603,893 · App. 09/819,160
Method and apparatus for switching an optical beam in a semiconductor substrate
Inventors:
Ansheng Liu, Mario Paniccia, Dean Samara-Rubio, Chi D. Chu
Patented Case
View Patent ↗
Granted: Aug 5, 2003
Filed: Mar 27, 2001
Inventors
Ansheng Liu
Mario Paniccia
Dean Samara-Rubio
Chi D. Chu
Assignee (at issue)
Intel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.