Granted Patent
Utility
US 6,605,511 · App. 10/295,738
Method of forming nitridated tunnel oxide barriers for flash memory technology circuitry and STI and LOCOS isolation
Inventors:
Tuan Pham, Mark T. Ramsbey, Yu Sun, Chi Chang
Patented Case
View Patent ↗
Granted: Aug 12, 2003
Filed: Nov 15, 2002
Inventors
Tuan Pham
Mark T. Ramsbey
Yu Sun
Chi Chang
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.