Granted Patent
Utility
US 6,605,512 · App. 10/026,841
Manufacturing method of a semiconductor device
Inventor:
Yukihiro Kiyota
Patented Case
View Patent ↗
Granted: Aug 12, 2003
Filed: Dec 27, 2001
Inventor
Yukihiro Kiyota
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.