Granted Patent
Utility
US 6,605,519 · App. 09/846,214
Method for thin film lift-off processes using lateral extended etching masks and device
Inventor:
David G. Lishan
Patented Case
View Patent ↗
Granted: Aug 12, 2003
Filed: May 2, 2001
Inventor
David G. Lishan
Assignee (at issue)
Unaxis USA Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.