Granted Patent
Utility
US 6,605,530 · App. 10/287,616
Method for fabricating semiconductor integrated circuit
Inventors:
Yoshitaka Nakamura, Tsuyoshi Tamaru, Naoki Fukuda, Hidekazu Goto, Isamu Asano, Hideo Aoki, Keizo Kawakita, Satoru Yamada, Katsuhiko Tanaka, Hiroshi Sakuma, Masayoshi Hirasawa
Patented Case
View Patent ↗
Granted: Aug 12, 2003
Filed: Nov 5, 2002
Inventors
Yoshitaka Nakamura
Tsuyoshi Tamaru
Naoki Fukuda
Hidekazu Goto
Isamu Asano
Hideo Aoki
Keizo Kawakita
Satoru Yamada
Katsuhiko Tanaka
Hiroshi Sakuma
Masayoshi Hirasawa
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.