IP Library Granted Patent US 6,605,539
Granted Patent Utility
US 6,605,539 · App. 09/994,668

Electro-mechanical polishing of platinum container structure

Inventors: Whonchee Lee, Scott Meikle
Patented Case View Patent ↗
Granted: Aug 12, 2003 Filed: Nov 28, 2001
Inventors
Whonchee Lee
Scott Meikle
Assignee (at issue)
Micron Technology, Inc.

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Quick Facts
Patent No.
US 6,605,539
App. No.
09/994,668
Filed
2001-11-28
Granted
2003-08-12
Kind
B2