Granted Patent
Utility
US 6,605,864 · App. 09/901,524
Support matrix for integrated semiconductors, and method for producing it
Inventors:
Knut Kahlisch, Henning Mieth
Patented Case
View Patent ↗
Granted: Aug 12, 2003
Filed: Jul 9, 2001
Inventors
Knut Kahlisch
Henning Mieth
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.