Granted Patent
Utility
US 6,606,151 · App. 09/916,917
Grating patterns and method for determination of azimuthal and radial aberration
Inventors:
Gerhard Kunkel, Shahid Butt, Joseph P. Kirk
Patented Case
View Patent ↗
Granted: Aug 12, 2003
Filed: Jul 27, 2001
Inventors
Gerhard Kunkel
Shahid Butt
Joseph P. Kirk
Assignees (at issue)
Infineon Technologies AG
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.