Granted Patent
Utility
US 6,606,739 · App. 10/028,479
Scaling method for a digital photolithography system
Inventors:
Takashi Kanatake, Wenhui Mei, Akira Ishikawa
Patented Case
View Patent ↗
Granted: Aug 12, 2003
Filed: Dec 19, 2001
Inventors
Takashi Kanatake
Wenhui Mei
Akira Ishikawa
Assignee (at issue)
Ball Semiconductor Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.